Research Article Open Access

Nanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic Deposition

Yan Ma1, Tongbao Li1, Yajun Zhao1, Baowu Zhang1, Wen Wu1, Yili Xiao1, Pingping Zhang1 and Weigang Gong1
  • 1 Tongji University, China

Abstract

Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to establish nanoscale pitch standards. When the atoms pass though laser standing wave field, the atoms will change the moving trajectory and be focused to the node (or antinode) of the laser standing wave according to the detuning of laser frequency and atomic resonant frequency. Because of the period of the laser standing wave, laser mask will form the anologue of an array of cylindrical lense. If a substrate is positioned at the focal plane of this lens array, a periodic structure is depositing onto the surface. The period of this structure is λ/2 of laser. Results: In this letter, a 425 nm laser light standing wave is used to focus a beam of chromium atoms to fabricate the nanoscale pitch standards sample of 213±0.1 nm. The height was 4 nm. The (FWHM) width of 64±6 nm. Conclusion/Recommendations: The period of this structure is λ2 of laser, whose spatial period can be traced directly to an atomic transtition frequency and the uncertainty possibility is 10-5, which is fitted to be as the nanopitch standards.

Current Research in Nanotechnology
Volume 2 No. 2, 2011, 127-131

DOI: https://doi.org/10.3844/ajnsp.2011.127.131

Published On: 3 September 2012

How to Cite: Ma, Y., Li, T., Zhao, Y., Zhang, B., Wu, W., Xiao, Y., Zhang, P. & Gong, W. (2011). Nanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic Deposition. Current Research in Nanotechnology, 2(2), 127-131. https://doi.org/10.3844/ajnsp.2011.127.131

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Keywords

  • Nanoscale pitch standard
  • laser-focused atomic deposition
  • laser cooling
  • chromium atoms
  • laser frequency
  • atomic transtition frequency
  • focal plane
  • atomic resonant frequency
  • atomic transition
  • periodic structure