Research Article Open Access

Fabrication of X-Ray Optics for a Portable Total Reflection X-Ray Fluorescence Spectrometer Using Electrolytic in Process Dressing Grinding and Magnetorheological Finishing

Shinsuke Kunimura1, Hiroshi Kasuga1, Yosuke Hachisu1 and Hitoshi Ohmori1
  • 1 The Institute of Physical and Chemical Research, Japan

Abstract

Problem statement: A portable X-ray elemental analyzer (total reflection X-ray fluorescence spectrometer) has been developed since 2006 and this spectrometer made it possible to perform ultra trace elemental determination. The intensity of scattered X-rays that become background noise in a spectrum is reduced with the improvement in surface accuracy of an X-ray reflector used in the portable spectrometer and therefore using an X-ray reflector with an ultra-precision specular surface can lead to further improvement in detection limits obtained by the portable spectrometer. Approach: In the present paper, a combination of electrolytic in process dressing (ELID) grinding and Magnetorheological Finishing (MRF) is applied to fabricating an X-ray reflector for the portable spectrometer. Magnetorheological finishing is used as final finishing after ELID grinding. Results: A peak to valley value of 107 nm and a root mean square value of 17 nm in a surface cross section with a length of 27 mm are obtained with the use of ELID grinding and MRF. Conclusion: X-ray reflectors having a large specular surface can be fabricated using a combination of ELID grinding and MRF. Using a grinding wheel containing diamond abrasive grains finer than those in the present paper in ELID grinding can lead to further improvement in surface accuracy of an X-ray reflector.

Current Research in Nanotechnology
Volume 1 No. 2, 2010, 40-44

DOI: https://doi.org/10.3844/ajnsp.2010.40.44

Published On: 21 June 2011

How to Cite: Kunimura, S., Kasuga, H., Hachisu, Y. & Ohmori, H. (2010). Fabrication of X-Ray Optics for a Portable Total Reflection X-Ray Fluorescence Spectrometer Using Electrolytic in Process Dressing Grinding and Magnetorheological Finishing. Current Research in Nanotechnology, 1(2), 40-44. https://doi.org/10.3844/ajnsp.2010.40.44

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Keywords

  • Electrolytic in process dressing grinding
  • magnetorheological finishing
  • total reflection X-ray fluorescence
  • Portable spectrometer
  • X-ray reflector