Development of Nanostructured Stress Free Pt-Rich FePt Films for Micro Electro Mechanical System Applications

Abstract

Problem statement: The electroplating technique is especially interesting due to its low cost, high throughput and high quality of deposit. Magnetic thin films are extensively used in various electronic devices including high density recording media and Micro Electro Mechanical (MEMS) devices. So we examined FePt films and give good magnetic properties. Approach: The Pt-rich FePt alloys were electrodeposited galvanostatically by various temperature baths. Results: The elemental percentage of Pt in the film was very high determined by X-ray spectroscopy. Surface characterization was carried out by using X-Ray Diffractometer (XRD) and Scanning Electron Microscope (SEM).The magnetic properties determined by Vibrating sample magnetometer. Hardness and adhesion of the films were also discussed. Conclusion/Recommendation: The films were soft magnetic character of lower temperature bath and become a hard magnetic character of higher temperature bath. Therefore this magnetic films could be an important material for incorporate in Micro electro mechanical devices.