Research Article Open Access

Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique

Seyed Mohammad Rozati1 and Tohid Ganj1
  • 1 Department of Physics, University of Guilan Rasht 41335, Iran

Abstract

Highly conductive transparent In2O3:Sn (ITO) thin films were prepared onto glass substrate using the spray pyrolysis technique. It is observed that these films are polycrystalline with the preferred orientation of [400]. The extent of this orientation increases with substrate temperature. The results show that films with a sheet resistance as low as 35Ω/cm2 and with a transmittance as high as 90% in visible range can be achieved by controlling the substrate temperature and other preparation process.

American Journal of Applied Sciences
Volume 2 No. 6, 2005, 1106-1108

DOI: https://doi.org/10.3844/ajassp.2005.1106.1108

Submitted On: 26 August 2005 Published On: 30 June 2005

How to Cite: Rozati, S. M. & Ganj, T. (2005). Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique. American Journal of Applied Sciences, 2(6), 1106-1108. https://doi.org/10.3844/ajassp.2005.1106.1108

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Keywords

  • In2O3: Sn
  • spray pyrolysis
  • TCO
  • ITO