Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique
Seyed Mohammad Rozati and Tohid Ganj
DOI : 10.3844/ajassp.2005.1106.1108
American Journal of Applied Sciences
Volume 2, Issue 6
Pages 1106-1108
Abstract
Highly conductive transparent In2O3:Sn (ITO) thin films were prepared onto glass substrate using the spray pyrolysis technique. It is observed that these films are polycrystalline with the preferred orientation of [400]. The extent of this orientation increases with substrate temperature. The results show that films with a sheet resistance as low as 35?/cm2 and with a transmittance as high as 90% in visible range can be achieved by controlling the substrate temperature and other preparation process.
Copyright
© 2005 Seyed Mohammad Rozati and Tohid Ganj. This is an open access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
