Fabrication of X-Ray Optics for a Portable Total Reflection X-Ray Fluorescence Spectrometer Using Electrolytic in Process Dressing Grinding and Magnetorheological Finishing
Shinsuke Kunimura, Hiroshi Kasuga, Yosuke Hachisu and Hitoshi Ohmori
DOI : 10.3844/ajnsp.2010.40.44
Current Research in Nanotechnology
Volume 1, 2010
Problem statement: A portable X-ray elemental analyzer (total reflection X-ray fluorescence spectrometer) has been developed since 2006 and this spectrometer made it possible to perform ultra trace elemental determination. The intensity of scattered X-rays that become background noise in a spectrum is reduced with the improvement in surface accuracy of an X-ray reflector used in the portable spectrometer and therefore using an X-ray reflector with an ultra-precision specular surface can lead to further improvement in detection limits obtained by the portable spectrometer. Approach: In the present paper, a combination of electrolytic in process dressing (ELID) grinding and Magnetorheological Finishing (MRF) is applied to fabricating an X-ray reflector for the portable spectrometer. Magnetorheological finishing is used as final finishing after ELID grinding. Results: A peak to valley value of 107 nm and a root mean square value of 17 nm in a surface cross section with a length of 27 mm are obtained with the use of ELID grinding and MRF. Conclusion: X-ray reflectors having a large specular surface can be fabricated using a combination of ELID grinding and MRF. Using a grinding wheel containing diamond abrasive grains finer than those in the present paper in ELID grinding can lead to further improvement in surface accuracy of an X-ray reflector.
© 2010 Shinsuke Kunimura, Hiroshi Kasuga, Yosuke Hachisu and Hitoshi Ohmori. This is an open access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.